In this paper, we address the unique nature of fully textured, high surface-to-volume 3C-SiC films, as produced by intrinsic growth anisotropy, in turn generated by the high velocity of the stacking fault growth front in two-dimensional (111) platelets. Structural interpretation of high resolution scanning electron microscopy and transmission electron microscopy data is carried out for samples grown in a hot-wall low-pressure chemical vapour deposition reactor with trichlorosilane and ethylene precursors, under suitable deposition conditions. By correlating the morphology and the X-ray diffraction analysis we also point out that twinning along (111) planes is very frequent in such materials, which changes the free-platelet configuration.

Vanacore, G., Chrastina, D., Scalise, E., Barbisan, L., Ballabio, A., Mauceri, M., et al. (2022). Nanostructured 3C-SiC on Si by a network of (111) platelets: a fully textured film generated by intrinsic growth anisotropy. PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 24(39), 24487-24494 [10.1039/d2cp03250c].

Nanostructured 3C-SiC on Si by a network of (111) platelets: a fully textured film generated by intrinsic growth anisotropy

Vanacore G. M.;Scalise E.;Barbisan L.;Capitani G.;Marzegalli A.;Bergamaschini R.;Miglio L.
2022

Abstract

In this paper, we address the unique nature of fully textured, high surface-to-volume 3C-SiC films, as produced by intrinsic growth anisotropy, in turn generated by the high velocity of the stacking fault growth front in two-dimensional (111) platelets. Structural interpretation of high resolution scanning electron microscopy and transmission electron microscopy data is carried out for samples grown in a hot-wall low-pressure chemical vapour deposition reactor with trichlorosilane and ethylene precursors, under suitable deposition conditions. By correlating the morphology and the X-ray diffraction analysis we also point out that twinning along (111) planes is very frequent in such materials, which changes the free-platelet configuration.
Articolo in rivista - Articolo scientifico
nanosheets; 3C-SiC
English
24487
24494
8
Vanacore, G., Chrastina, D., Scalise, E., Barbisan, L., Ballabio, A., Mauceri, M., et al. (2022). Nanostructured 3C-SiC on Si by a network of (111) platelets: a fully textured film generated by intrinsic growth anisotropy. PHYSICAL CHEMISTRY CHEMICAL PHYSICS, 24(39), 24487-24494 [10.1039/d2cp03250c].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/395844
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