We provide an in-depth characterization of the dislocation distribution in partially relaxed Si0.92Ge0.08/Si(001) films. This is achieved by an innovative and general method, combining two state-of-the-art characterization techniques through suitable modeling. After having inferred the dislocation positions from transmission-electron-microscopy images, we theoretically reproduce scanning-x-ray-diffraction-microscopy tilt maps measured on the very same region of the sample. We obtain a nearly perfect match between model predictions and experimental data. As a result, we claim that it is possible to establish a local, direct correlation between the dislocations revealed by the transmission-electron-microscopy analysis and the measured lattice tilt distribution.

Rovaris, F., Zoellner, M., Zaumseil, P., Schubert, M., Marzegalli, A., Di Gaspare, L., et al. (2018). Misfit-Dislocation Distributions in Heteroepitaxy: From Mesoscale Measurements to Individual Defects and Back. PHYSICAL REVIEW APPLIED, 10(5) [10.1103/PhysRevApplied.10.054067].

Misfit-Dislocation Distributions in Heteroepitaxy: From Mesoscale Measurements to Individual Defects and Back

Rovaris, Fabrizio;Marzegalli, Anna;Montalenti, Francesco
2018

Abstract

We provide an in-depth characterization of the dislocation distribution in partially relaxed Si0.92Ge0.08/Si(001) films. This is achieved by an innovative and general method, combining two state-of-the-art characterization techniques through suitable modeling. After having inferred the dislocation positions from transmission-electron-microscopy images, we theoretically reproduce scanning-x-ray-diffraction-microscopy tilt maps measured on the very same region of the sample. We obtain a nearly perfect match between model predictions and experimental data. As a result, we claim that it is possible to establish a local, direct correlation between the dislocations revealed by the transmission-electron-microscopy analysis and the measured lattice tilt distribution.
Articolo in rivista - Articolo scientifico
Heteroepitaxy, modeling, cross-hatch
English
2018
10
5
054067
reserved
Rovaris, F., Zoellner, M., Zaumseil, P., Schubert, M., Marzegalli, A., Di Gaspare, L., et al. (2018). Misfit-Dislocation Distributions in Heteroepitaxy: From Mesoscale Measurements to Individual Defects and Back. PHYSICAL REVIEW APPLIED, 10(5) [10.1103/PhysRevApplied.10.054067].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/214424
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