We report the effect of laser annealing on the structural and electronic properties of nc-Si/a-Si:H samples grown close to the amorphous to nanocrystalline transition. The nc-Si/a-Si:H thin films were produced by low-energy plasma-enhanced chemical vapor deposition through a gas discharge containing SiH4. The samples were subjected to different laser fluencies and were characterized for changes in their structural and electronic properties via Raman spectroscopy and photoluminescence measurements. The laser annealing effects are twofold: i) the nanocrystalline phase grows, during the laser treatment, respect to the amorphous phase; ii) the photoluminescence spectra show the suppression, after laser annealing, of the frequencies above the crystalline Si band–gap.

Poliani, E., Somaschini, C., Sanguinetti, S., Grilli, E., Guzzi, M., LE DONNE, A., et al. (2009). Tuning by means of laser annealing of electronic and structural properties of nc–Si/a–Si:H. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 159-160, 31-33 [10.1016/j.mseb.2008.10.016].

Tuning by means of laser annealing of electronic and structural properties of nc–Si/a–Si:H

SANGUINETTI, STEFANO;GRILLI, EMANUELE ENRICO;GUZZI, MARIO;LE DONNE, ALESSIA;BINETTI, SIMONA OLGA;Pizzini, S;
2009

Abstract

We report the effect of laser annealing on the structural and electronic properties of nc-Si/a-Si:H samples grown close to the amorphous to nanocrystalline transition. The nc-Si/a-Si:H thin films were produced by low-energy plasma-enhanced chemical vapor deposition through a gas discharge containing SiH4. The samples were subjected to different laser fluencies and were characterized for changes in their structural and electronic properties via Raman spectroscopy and photoluminescence measurements. The laser annealing effects are twofold: i) the nanocrystalline phase grows, during the laser treatment, respect to the amorphous phase; ii) the photoluminescence spectra show the suppression, after laser annealing, of the frequencies above the crystalline Si band–gap.
Articolo in rivista - Articolo scientifico
Nanocrystalline silicon Laser annealing Amorphous silicon Photoluminescence Raman scattering
English
Poliani, E., Somaschini, C., Sanguinetti, S., Grilli, E., Guzzi, M., LE DONNE, A., et al. (2009). Tuning by means of laser annealing of electronic and structural properties of nc–Si/a–Si:H. MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 159-160, 31-33 [10.1016/j.mseb.2008.10.016].
Poliani, E; Somaschini, C; Sanguinetti, S; Grilli, E; Guzzi, M; LE DONNE, A; Binetti, S; Pizzini, S; Chrastina, D; Isella, G
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/10281/8105
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