A New Calibration Technique of Electromagnetic Simulators for Accurate Analyses of Microwave Components on Epitaxial Wafers

This paper describes an innovative methodology to calibrate EM simulators oriented to monolithic microwave integrated circuit design. The proposed approach allows one to accurately estimate the substrate characteristics without realizing expensive on-wafer structures that require a large substrate area. We will demonstrate how the proposed approach ultimately results in higher EM simulation accuracy, describing and quantifying the limitations that arise from commonly adopted calibration procedures for EM simulators. Authors