The optical functions of amorphous and polycrystalline silicon thin films deposited on single oxidized silicon substrates by chemical vapor deposition in a wide range of deposition temperatures have been determined using spectroscopic ellipsometry. The data analysis is performed by direct inversion of the experimental spectra, therefore, obtaining results independent of any film modeling. The optical results indicate that the film structure changes as the deposition temperature increases from amorphous to polycrystalline with different grain size and distribution

Borghesi, A., Giardini, M., Marazzi, M., Sassella, A., De Santi, G. (1997). Ellipsometric characterization of amorphous and polycrystalline silicon films deposited using a single wafer reactor. APPLIED PHYSICS LETTERS, 70(7), 892-894 [10.1063/1.118306].

Ellipsometric characterization of amorphous and polycrystalline silicon films deposited using a single wafer reactor

Borghesi, A;Sassella, A;
1997

Abstract

The optical functions of amorphous and polycrystalline silicon thin films deposited on single oxidized silicon substrates by chemical vapor deposition in a wide range of deposition temperatures have been determined using spectroscopic ellipsometry. The data analysis is performed by direct inversion of the experimental spectra, therefore, obtaining results independent of any film modeling. The optical results indicate that the film structure changes as the deposition temperature increases from amorphous to polycrystalline with different grain size and distribution
Articolo in rivista - Articolo scientifico
polycrystalline silicon; thin films; ellipsometry
English
1997
70
7
892
894
none
Borghesi, A., Giardini, M., Marazzi, M., Sassella, A., De Santi, G. (1997). Ellipsometric characterization of amorphous and polycrystalline silicon films deposited using a single wafer reactor. APPLIED PHYSICS LETTERS, 70(7), 892-894 [10.1063/1.118306].
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/34398
Citazioni
  • Scopus 18
  • ???jsp.display-item.citation.isi??? 17
Social impact