Ge-on-Si substrates, made by a thin Ge relaxed layer with a low threading dislocation density and reduced surface roughness deposited on Si, are capable of accommodating the mismatch between GaAs and Si substrate and can be used for the growth of high quality AlGaAs/GaAs layers and of GaAs nanostructures by droplet epitaxy, while maintaining a low thermal budget compatible with the integration of CMOS devices. © The Electrochemical Society.

Bietti, S., Cecchi, S., Frigeri, C., Grilli, E., Fedorov, A., Vinattieri, A., et al. (2012). Fabrication of Ge-on-Si substrates for the integration of high-quality GaAs nanostructures on Si. In 5th SiGe, Ge, and Related Compounds: Materials, Processing and Devices Symposium - 220th ECS Meeting (pp.783-789). ELECTROCHEMICAL SOC INC [10.1149/05009.0783ecst].

Fabrication of Ge-on-Si substrates for the integration of high-quality GaAs nanostructures on Si

Bietti, S;Cecchi, S;Frigeri, C;Grilli, E;Sanguinetti, S
2012

Abstract

Ge-on-Si substrates, made by a thin Ge relaxed layer with a low threading dislocation density and reduced surface roughness deposited on Si, are capable of accommodating the mismatch between GaAs and Si substrate and can be used for the growth of high quality AlGaAs/GaAs layers and of GaAs nanostructures by droplet epitaxy, while maintaining a low thermal budget compatible with the integration of CMOS devices. © The Electrochemical Society.
paper
droplet epitaxy, III-V integration on Si, quantum dot, XRD
English
PRiMe 2012 - Pacific Rim Meeting on electrochemical and solid state science
2012
5th SiGe, Ge, and Related Compounds: Materials, Processing and Devices Symposium - 220th ECS Meeting
978-160768357-5
2012
50
9
783
789
none
Bietti, S., Cecchi, S., Frigeri, C., Grilli, E., Fedorov, A., Vinattieri, A., et al. (2012). Fabrication of Ge-on-Si substrates for the integration of high-quality GaAs nanostructures on Si. In 5th SiGe, Ge, and Related Compounds: Materials, Processing and Devices Symposium - 220th ECS Meeting (pp.783-789). ELECTROCHEMICAL SOC INC [10.1149/05009.0783ecst].
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/277586
Citazioni
  • Scopus 1
  • ???jsp.display-item.citation.isi??? 1
Social impact