Borophosphosilicate glass (BPSG) films produced by Sub-Atmospheric Pressure Chemical Vapor Deposition (SACVD) with different B and P concentrations have been investigated by ultra-violet (UV) Raman and electron paramagnetic resonance (EPR) spectroscopies. We observe a correlation between the main feature of the UV-Raman spectra in the as deposited films, the line at 1326(2) cm-1 attributed to the stretching vibrations of the P = O double bond, and the spin resonance signals attributed to the stable phosphorus-oxygen-hole-center (POHC) created after room temperature X-ray irradiation. The intensity of the P = O line as well as the intensity of the POHC EPR signal depend on the B content. The metastable configuration, POHCm, has been also observed by EPR. The B content does not affect significantly the concentration of this paramagnetic defect.
Fanciulli, M., Bonera, E., Carollo, E., Zanotti, L. (2001). EPR and UV-Raman study of BPSG thin films: structure and defects. MICROELECTRONIC ENGINEERING, 55(1-4), 65-71 [10.1016/S0167-9317(00)00430-5].
EPR and UV-Raman study of BPSG thin films: structure and defects
FANCIULLI, MARCO;BONERA, EMILIANO;
2001
Abstract
Borophosphosilicate glass (BPSG) films produced by Sub-Atmospheric Pressure Chemical Vapor Deposition (SACVD) with different B and P concentrations have been investigated by ultra-violet (UV) Raman and electron paramagnetic resonance (EPR) spectroscopies. We observe a correlation between the main feature of the UV-Raman spectra in the as deposited films, the line at 1326(2) cm-1 attributed to the stretching vibrations of the P = O double bond, and the spin resonance signals attributed to the stable phosphorus-oxygen-hole-center (POHC) created after room temperature X-ray irradiation. The intensity of the P = O line as well as the intensity of the POHC EPR signal depend on the B content. The metastable configuration, POHCm, has been also observed by EPR. The B content does not affect significantly the concentration of this paramagnetic defect.
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