The growth dynamics of Ga(In)N semiconductors by Plasma-Assisted Molecular Beam Epitaxy (PAMBE) at low temperatures (T = 450 °C) is here investigated. The presence of droplets at the growth surface strongly affects the adatom incorporation dynamics, making the growth rate a decreasing function of the metal flux impinging on the surface. We explain this phenomenon via a model that considers droplet effects on the incorporation of metal adatoms into the crystal. A relevant role is played by the vapor-liquid-solid growth mode that takes place under the droplets due to nitrogen molecules directly impinging on the droplets. The role of droplets in the growth dynamics here observed and modeled in the case of Nitride semiconductors is general and it can be extended to describe the growth of the material class of binary compounds when droplets are present on the surface.

Azadmand, M., Barabani, L., Bietti, S., Chrastina, D., Bonera, E., Acciarri, M., et al. (2018). Droplet Controlled Growth Dynamics in Molecular Beam Epitaxy of Nitride Semiconductors. SCIENTIFIC REPORTS, 8(1) [10.1038/s41598-018-28984-9].

Droplet Controlled Growth Dynamics in Molecular Beam Epitaxy of Nitride Semiconductors

AZADMAND, MANI;Bietti, Sergio;Bonera, Emiliano;Acciarri, Maurizio;TSUKAMOTO, SHIRO;Sanguinetti, Stefano
2018

Abstract

The growth dynamics of Ga(In)N semiconductors by Plasma-Assisted Molecular Beam Epitaxy (PAMBE) at low temperatures (T = 450 °C) is here investigated. The presence of droplets at the growth surface strongly affects the adatom incorporation dynamics, making the growth rate a decreasing function of the metal flux impinging on the surface. We explain this phenomenon via a model that considers droplet effects on the incorporation of metal adatoms into the crystal. A relevant role is played by the vapor-liquid-solid growth mode that takes place under the droplets due to nitrogen molecules directly impinging on the droplets. The role of droplets in the growth dynamics here observed and modeled in the case of Nitride semiconductors is general and it can be extended to describe the growth of the material class of binary compounds when droplets are present on the surface.
Articolo in rivista - Articolo scientifico
Multidisciplinary
English
2018
8
1
11278
partially_open
Azadmand, M., Barabani, L., Bietti, S., Chrastina, D., Bonera, E., Acciarri, M., et al. (2018). Droplet Controlled Growth Dynamics in Molecular Beam Epitaxy of Nitride Semiconductors. SCIENTIFIC REPORTS, 8(1) [10.1038/s41598-018-28984-9].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/212722
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