The problem of in situ monitoring the film thickness by quartz microbalance during vacuum deposition of organic-molecular semiconductors is addressed herein by setting a procedure for sensor calibration based on ex situ analysis of the deposited molecular film by atomic-force microscopy measurements. The procedure is applied to the growth of molecular-organic thin films on silica. Some physical parameters of the materials are deduced. (C) 2004 American Vacuum Society.

Campione, M., Cartotti, M., Pinotti, E., Sassella, A., & Borghesi, A. (2004). Thickness measurements by quartz microbalance during thin-film growth by organic-molecular-beam deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. A, AN INTERNATIONAL JOURNAL DEVOTED TO VACUUM, SURFACES, AND FILMS, 22(3), 482-486 [10.1116/1.1690249].

Thickness measurements by quartz microbalance during thin-film growth by organic-molecular-beam deposition

CAMPIONE, MARCELLO;SASSELLA, ADELE;BORGHESI, ALESSANDRO
2004-05

Abstract

The problem of in situ monitoring the film thickness by quartz microbalance during vacuum deposition of organic-molecular semiconductors is addressed herein by setting a procedure for sensor calibration based on ex situ analysis of the deposited molecular film by atomic-force microscopy measurements. The procedure is applied to the growth of molecular-organic thin films on silica. Some physical parameters of the materials are deduced. (C) 2004 American Vacuum Society.
Articolo in rivista - Articolo scientifico
molecular materials; thin film growth; thickness monitoring; microbalance
English
482
486
5
Campione, M., Cartotti, M., Pinotti, E., Sassella, A., & Borghesi, A. (2004). Thickness measurements by quartz microbalance during thin-film growth by organic-molecular-beam deposition. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY. A, AN INTERNATIONAL JOURNAL DEVOTED TO VACUUM, SURFACES, AND FILMS, 22(3), 482-486 [10.1116/1.1690249].
Campione, M; Cartotti, M; Pinotti, E; Sassella, A; Borghesi, A
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/10281/1913
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