Results of measurements of x-ray diffraction, electron scanning microscopy and electrical conductivity of thick, polycrystalline RuO2 films obtained by decomposing ruthenium trichloride are presented and discussed. The influence of the preparation procedure, process temperature, chlorine content and nature of the substrate on electrical and structural properties is also considered.
Pizzini, S., Buzzanca, G., Mari, C., Rossi, L., Torchio, S. (1972). Preparation, structure and electrical properties of thick ruthenium dioxide films. MATERIALS RESEARCH BULLETIN, 7(5), 449-462 [10.1016/0025-5408(72)90147-X].
Preparation, structure and electrical properties of thick ruthenium dioxide films
Pizzini, S;MARI, CLAUDIO MARIA;
1972
Abstract
Results of measurements of x-ray diffraction, electron scanning microscopy and electrical conductivity of thick, polycrystalline RuO2 films obtained by decomposing ruthenium trichloride are presented and discussed. The influence of the preparation procedure, process temperature, chlorine content and nature of the substrate on electrical and structural properties is also considered.
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