Magnetic tunnel junctions, i.e. the combination of two ferromagnetic electrodes separated by an ultrathin tunnel oxide barrier, are core elements in a large variety of spin-based devices. We report on the use of combined chemical vapor and atomic layer deposition processes for the synthesis of magnetic tunnel junctions with no vacuum break. Structural, chemical and morphological characterizations of selected ferromagnetic and oxide layers are reported, together with the evidence of tunnel magnetoresistance effect in patterned Fe/MgO/Co junctions. (C) 2011 Elsevier B.V. All rights reserved.

Mantovan, R., Vangelista, S., Kutrzeba Kotowska, B., Cocco, S., Lamperti, A., Tallarida, G., et al. (2012). Synthesis of magnetic tunnel junctions with full in situ atomic layer and chemical vapor deposition processes. THIN SOLID FILMS, 520(14), 4820-4822 [10.1016/j.tsf.2011.08.037].

Synthesis of magnetic tunnel junctions with full in situ atomic layer and chemical vapor deposition processes

FANCIULLI, MARCO
2012

Abstract

Magnetic tunnel junctions, i.e. the combination of two ferromagnetic electrodes separated by an ultrathin tunnel oxide barrier, are core elements in a large variety of spin-based devices. We report on the use of combined chemical vapor and atomic layer deposition processes for the synthesis of magnetic tunnel junctions with no vacuum break. Structural, chemical and morphological characterizations of selected ferromagnetic and oxide layers are reported, together with the evidence of tunnel magnetoresistance effect in patterned Fe/MgO/Co junctions. (C) 2011 Elsevier B.V. All rights reserved.
Articolo in rivista - Articolo scientifico
Magnetic tunnel junctions
English
2012
520
14
4820
4822
none
Mantovan, R., Vangelista, S., Kutrzeba Kotowska, B., Cocco, S., Lamperti, A., Tallarida, G., et al. (2012). Synthesis of magnetic tunnel junctions with full in situ atomic layer and chemical vapor deposition processes. THIN SOLID FILMS, 520(14), 4820-4822 [10.1016/j.tsf.2011.08.037].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/43752
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