The critical volume for the onset of plastic strain relaxation in SiGe islands on Si(001) is computed for different Ge contents and realistic shapes by using a three-dimensional model, with position-dependent dislocation energy. It turns out that the critical bases for dome- and barnlike islands are different for any composition. By comparison to extensive atomic force microscopy measurements of the footprints left on the Si substrates by islands grown at different temperatures (and compositions), we conclude that, in contrast with planar films, dislocation nucleation in 3D islands is fully thermodynamic. © 2007 The American Physical Society.

Marzegalli, A., Zinovyev, V., Montalenti, F., Rastelli, A., Stoffel, M., Merdzhanova, T., et al. (2007). Critical shape and size for dislocation nucleation in si1-xGex islands on Si(001). PHYSICAL REVIEW LETTERS, 99(23), 235505 [10.1103/PhysRevLett.99.235505].

Critical shape and size for dislocation nucleation in si1-xGex islands on Si(001)

MARZEGALLI, ANNA;MONTALENTI, FRANCESCO CIMBRO MATTIA;MIGLIO, LEONIDA
2007

Abstract

The critical volume for the onset of plastic strain relaxation in SiGe islands on Si(001) is computed for different Ge contents and realistic shapes by using a three-dimensional model, with position-dependent dislocation energy. It turns out that the critical bases for dome- and barnlike islands are different for any composition. By comparison to extensive atomic force microscopy measurements of the footprints left on the Si substrates by islands grown at different temperatures (and compositions), we conclude that, in contrast with planar films, dislocation nucleation in 3D islands is fully thermodynamic. © 2007 The American Physical Society.
Articolo in rivista - Articolo scientifico
Heteroepitaxy, plastic relaxation
English
2007
99
23
235505
open
Marzegalli, A., Zinovyev, V., Montalenti, F., Rastelli, A., Stoffel, M., Merdzhanova, T., et al. (2007). Critical shape and size for dislocation nucleation in si1-xGex islands on Si(001). PHYSICAL REVIEW LETTERS, 99(23), 235505 [10.1103/PhysRevLett.99.235505].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/2690
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