The race of integrated-circuit technology toward high bit density has already brought to transistor densities of the order of 10^9 cm^-2, yet keeping conventional circuit layouts. Crossbar structures are widely believed to meet the requirements of high bit density along with sustainable interconnection complexity avoiding the dramatic cost increase of the manufacturing facilities required by advanced lithography. In this work we demonstrate the possibility of producing poly-Si nanowires preserving bulk electrical properties and nonetheless so dense as to allow cross-point density in excess of 10^11 cm^-2. This result could be achieved by organizing silicon nanowires in nearly vertical arrays.
Cerofolini, G., Ferri, M., Romano, E., Suriano, F., Veronese, G., Solmi, S., et al. (2010). Tera scale integration via a redesign of the crossbar based on a vertical arrangement of poly-Si nanowires. SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 25(9), 095011 [10.1088/0268-1242/25/9/095011].
Tera scale integration via a redesign of the crossbar based on a vertical arrangement of poly-Si nanowires
NARDUCCI, DARIO
2010
Abstract
The race of integrated-circuit technology toward high bit density has already brought to transistor densities of the order of 10^9 cm^-2, yet keeping conventional circuit layouts. Crossbar structures are widely believed to meet the requirements of high bit density along with sustainable interconnection complexity avoiding the dramatic cost increase of the manufacturing facilities required by advanced lithography. In this work we demonstrate the possibility of producing poly-Si nanowires preserving bulk electrical properties and nonetheless so dense as to allow cross-point density in excess of 10^11 cm^-2. This result could be achieved by organizing silicon nanowires in nearly vertical arrays.File | Dimensione | Formato | |
---|---|---|---|
Cerofolini-2010-Semiconductor Science and Technology-AAM.pdf
accesso aperto
Descrizione: Article
Tipologia di allegato:
Author’s Accepted Manuscript, AAM (Post-print)
Licenza:
Creative Commons
Dimensione
378.77 kB
Formato
Adobe PDF
|
378.77 kB | Adobe PDF | Visualizza/Apri |
I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.