Metal sputtering is known to affect metal-insulating-semiconductor (MIS) devices where the insulator is an organic monolayer grafted onto crystalline substrates. We comparatively discuss current-voltage characteristics in MIS devices, where the insulating layer is either a thin oxide layer or an organic monolayer covalently grafted onto single-crystal silicon. Variation of the sputtering geometry from on-axis to off-axis configuration is analyzed to compare differences between them, obtaining the reduction of damages in the oxide layer accordingly to the supposed conduction mechanism, but no changes in organic layer of aliphatic molecules. Effects of ultraviolet radiations, already present during metal deposition, are also discussed

Di Vita, E., Narducci, D. (2007). Metallization of grafted silicon surfaces: sputtering-related damage effects. SURFACE SCIENCE, 601(13), 2855-2858 [10.1016/j.susc.2006.11.080].

Metallization of grafted silicon surfaces: sputtering-related damage effects

NARDUCCI, DARIO
2007

Abstract

Metal sputtering is known to affect metal-insulating-semiconductor (MIS) devices where the insulator is an organic monolayer grafted onto crystalline substrates. We comparatively discuss current-voltage characteristics in MIS devices, where the insulating layer is either a thin oxide layer or an organic monolayer covalently grafted onto single-crystal silicon. Variation of the sputtering geometry from on-axis to off-axis configuration is analyzed to compare differences between them, obtaining the reduction of damages in the oxide layer accordingly to the supposed conduction mechanism, but no changes in organic layer of aliphatic molecules. Effects of ultraviolet radiations, already present during metal deposition, are also discussed
Articolo in rivista - Articolo scientifico
sputter deposition; surface damage; self-assembled monolayer; metal-semiconductor interface
English
2007
601
13
2855
2858
none
Di Vita, E., Narducci, D. (2007). Metallization of grafted silicon surfaces: sputtering-related damage effects. SURFACE SCIENCE, 601(13), 2855-2858 [10.1016/j.susc.2006.11.080].
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/837
Citazioni
  • Scopus 3
  • ???jsp.display-item.citation.isi??? 2
Social impact