Self-similar patterns are frequently observed in Nature. Their reproduction is possible on a length scale 10<sup>2</sup>-10<sup>5</sup> nm with lithographic methods, but seems impossible on the nanometer length scale. It is shown that this goal may be achieved via a multiplicative variant of the multi-spacer patterning technology, in this way permitting the controlled preparation of fractal surfaces. © 2008 to the authors.
Cerofolini, G., Narducci, D., Amato, P., Romano, E. (2008). Fractal nanotechnology. NANOSCALE RESEARCH LETTERS, 3, 381-385 [10.1007/s11671-008-9170-0].
Fractal nanotechnology
NARDUCCI, DARIO;
2008
Abstract
Self-similar patterns are frequently observed in Nature. Their reproduction is possible on a length scale 102-105 nm with lithographic methods, but seems impossible on the nanometer length scale. It is shown that this goal may be achieved via a multiplicative variant of the multi-spacer patterning technology, in this way permitting the controlled preparation of fractal surfaces. © 2008 to the authors.
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