High phosphorus concentration was introduced in the near surface region of a highly resistive silicon substrate by ultra-low energy ion implantation (ULE-II), resulting in the formation of a two-dimensional electron gas (2DEG) with clear signature of weak antilocalization (WAL). In plane periodic modulation of dopant impurities notably affected the electron conduction and determined a significant increase of WAL signature.

Perego, M., Kuschlan, S., Perez-Murano, F., Llobet, J., Femandez-Regulez, M., Chiarcos, R., et al. (2025). Controlling Phosphorus Doping at the Nanoscale to Promote Synthetic Spin Orbit Coupling in Silicon. In 2025 Silicon Nanoelectronics Workshop (SNW) (pp.8-9). Institute of Electrical and Electronics Engineers Inc. [10.23919/snw65111.2025.11097218].

Controlling Phosphorus Doping at the Nanoscale to Promote Synthetic Spin Orbit Coupling in Silicon

Pulici A.;
2025

Abstract

High phosphorus concentration was introduced in the near surface region of a highly resistive silicon substrate by ultra-low energy ion implantation (ULE-II), resulting in the formation of a two-dimensional electron gas (2DEG) with clear signature of weak antilocalization (WAL). In plane periodic modulation of dopant impurities notably affected the electron conduction and determined a significant increase of WAL signature.
paper
Silicon, 2DEG, Ion Implantation, Phosphorus, Block Copolymers
English
2025 Silicon Nanoelectronics Workshop, SNW 2025 - 08-09 June 2025
2025
2025 Silicon Nanoelectronics Workshop (SNW)
9784863488168
2025
8
9
none
Perego, M., Kuschlan, S., Perez-Murano, F., Llobet, J., Femandez-Regulez, M., Chiarcos, R., et al. (2025). Controlling Phosphorus Doping at the Nanoscale to Promote Synthetic Spin Orbit Coupling in Silicon. In 2025 Silicon Nanoelectronics Workshop (SNW) (pp.8-9). Institute of Electrical and Electronics Engineers Inc. [10.23919/snw65111.2025.11097218].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/565926
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