This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture recognition is achieved by scanning surfaces over the sensing array and assessing the frequency spectrum of the sensor outputs.
Muhammad, H., Recchiuto, C., Oddo, C., Beccai, L., Anthony, C., Adams, M., et al. (2011). A capacitive tactile sensor array for surface texture discrimination. MICROELECTRONIC ENGINEERING, 88(8), 1811-1813 [10.1016/j.mee.2011.01.045].
A capacitive tactile sensor array for surface texture discrimination
Carrozza M. C.;
2011
Abstract
This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture recognition is achieved by scanning surfaces over the sensing array and assessing the frequency spectrum of the sensor outputs.
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