Impact of base size and shape on formation control of multifaceted InP nanopyramids by selective area metal organic vapor phase epitaxy

We report the impact of base size and shape on the evolution control of multifaceted InP (100) nanopyramids grown by selective area metal organic vapor phase epitaxy. The pyramid top surfaces are composed of a (100) center facet surrounded by high-index {103} and {115} facets. Their arrangement and (relative) size depend on the size and shape of the pyramid top area. For a certain shape, only the (100) facet remains below a critical size of the top area. The arrangement and (relative) size of the top facets in turn are governed by the {110} and {111} side facets whose area (ratio) depends on the pyramid base size and shape. This self-consistently determines the ratio of the (100) top facet area and the sum of the {110} and {111} side facet areas as well as the height of the pyramids. © 2009 American Institute of Physics.