Acoustic sensing through optical transduction represents a promising alternative to the conventional capacitive sensing used in MEMS microphones, especially when aiming at ultra-low noise (i.e. high DR) applications. This paper reports the design and the modeling of the sensing elements of a MEMS optical microphone. The basic transduction mechanism is presented and the main design parameters and challenges are explained and analyzed with advanced modeling techniques.
De Milleri, N., Onaran, G., Wiesbauer, A., Baschirotto, A. (2022). MEMS optical microphone based on light phase modulation. In European Solid-State Device Research Conference (pp.289-292). Editions Frontieres [10.1109/ESSDERC55479.2022.9947112].
MEMS optical microphone based on light phase modulation
De Milleri N.;Baschirotto A.
2022
Abstract
Acoustic sensing through optical transduction represents a promising alternative to the conventional capacitive sensing used in MEMS microphones, especially when aiming at ultra-low noise (i.e. high DR) applications. This paper reports the design and the modeling of the sensing elements of a MEMS optical microphone. The basic transduction mechanism is presented and the main design parameters and challenges are explained and analyzed with advanced modeling techniques.
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