A series of fine grained C49 thin films were prepared by depositing Ti films on heated amorphous as well as crystalline silicon substrates. Rapid thermal processing at temperatures between 700 and 775 °C was used to transform the metastable C49 phase into the stable C54. The evolution of the film structure and morphology during the transformation was investigated by sheet resistance, optical spectroscopy, diffuse reflectance and AFM measurements. One structural model which could account for our data is proposed according to crystallographic information present in the literature

Bocelli, S., Marabelli, F., Iannuzzi, M., Miglio, L., Grimaldi, M., La Via, F. (1998). Structure, morphology and kinetics of the C49 to C54 phase transformation in TiSi2 thin films. In Proceedings of the 1997 MRS Fall Symposium (pp.593-598). Warrendale, PA, United States : MRS.

Structure, morphology and kinetics of the C49 to C54 phase transformation in TiSi2 thin films

MIGLIO, LEONIDA;
1998

Abstract

A series of fine grained C49 thin films were prepared by depositing Ti films on heated amorphous as well as crystalline silicon substrates. Rapid thermal processing at temperatures between 700 and 775 °C was used to transform the metastable C49 phase into the stable C54. The evolution of the film structure and morphology during the transformation was investigated by sheet resistance, optical spectroscopy, diffuse reflectance and AFM measurements. One structural model which could account for our data is proposed according to crystallographic information present in the literature
paper
TiSi2
English
Symposium B on Phase Transformations and Systems Driven Far From Equilibrium at the Materials-Research-Society Fall Meeting DEC 01-05
1997
Atzmon, M; Bellon, P; Ma, E; Trivedi, R
Proceedings of the 1997 MRS Fall Symposium
1-55899-386-X
1998
481
593
598
none
Bocelli, S., Marabelli, F., Iannuzzi, M., Miglio, L., Grimaldi, M., La Via, F. (1998). Structure, morphology and kinetics of the C49 to C54 phase transformation in TiSi2 thin films. In Proceedings of the 1997 MRS Fall Symposium (pp.593-598). Warrendale, PA, United States : MRS.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/44174
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