Spolaore, M., Tramontin, L., Serianni, G., Pomaro, N., Antoni, V., Bagatin, M., et al. (1999). Characterisation of a magnetron sputtering plasma by Langmuir and magnetic probes. In Proceedings of the XXIV International Conference on Phenomena in Ionised Gases (pp.19-20). POLISH ACAD SCIENCES, SPACE RESEARCH CENTRE.

Characterisation of a magnetron sputtering plasma by Langmuir and magnetic probes

Martines, E
1999

poster + paper
DC magnetron sputtering plasma; Langmuir probes
English
XXIV International Conference on Phenomena in Ionised Gases
1999
Proceedings of the XXIV International Conference on Phenomena in Ionised Gases
1999
3
19
20
none
Spolaore, M., Tramontin, L., Serianni, G., Pomaro, N., Antoni, V., Bagatin, M., et al. (1999). Characterisation of a magnetron sputtering plasma by Langmuir and magnetic probes. In Proceedings of the XXIV International Conference on Phenomena in Ionised Gases (pp.19-20). POLISH ACAD SCIENCES, SPACE RESEARCH CENTRE.
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/421480
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