We describe our experience on design and fabrication, on high-resistivity silicon substrates, of microstrip detectors and integrated electronics, devoted to high-energy physics experiments and medical/industrial imaging applications. We report on the full program of our collaboration, with particular regards to the tuning of a new fabrication process, allowing for the production of good quality transistors, while keeping under control the basic detector parameters, such as leakage current. Experimental results on JFET and bipolar transistors are presented, and a microstrip detector with an integrated JFET in source-follower configuration is introduced.

Dalla Betta, G., Batignani, G., Bettarini, S., Boscardin, M., Bosisio, L., Carpinelli, M., et al. (2002). Feasibility studies of microelectrode silicon detectors with integrated electronics. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A, ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, 478(1-2), 372-376 [10.1016/S0168-9002(01)01777-6].

Feasibility studies of microelectrode silicon detectors with integrated electronics

CARPINELLI, Massimo;
2002

Abstract

We describe our experience on design and fabrication, on high-resistivity silicon substrates, of microstrip detectors and integrated electronics, devoted to high-energy physics experiments and medical/industrial imaging applications. We report on the full program of our collaboration, with particular regards to the tuning of a new fabrication process, allowing for the production of good quality transistors, while keeping under control the basic detector parameters, such as leakage current. Experimental results on JFET and bipolar transistors are presented, and a microstrip detector with an integrated JFET in source-follower configuration is introduced.
Articolo in rivista - Articolo scientifico
Biopolar transistors; Electrical characterisation; Fabrication technology; Field-effect devices; Silicon microstrip detectors;
English
372
376
5
Dalla Betta, G., Batignani, G., Bettarini, S., Boscardin, M., Bosisio, L., Carpinelli, M., et al. (2002). Feasibility studies of microelectrode silicon detectors with integrated electronics. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH. SECTION A, ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, 478(1-2), 372-376 [10.1016/S0168-9002(01)01777-6].
Dalla Betta, G; Batignani, G; Bettarini, S; Boscardin, M; Bosisio, L; Carpinelli, M; Dittongo, S; Forti, F; Giorgi, M; Gregori, P; Lusiani, A; Manghisoni, M; Pignatel, G; Rama, M; Ratti, L; Re, V; Sandrelli, F; Speziali, V; Svelto, F; Zorzi, N
File in questo prodotto:
Non ci sono file associati a questo prodotto.

I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.

Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/390052
Citazioni
  • Scopus 10
  • ???jsp.display-item.citation.isi??? 9
Social impact