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Serianni, G., Antoni, V., Cavazzana, R., Mayni, L., Martines, E., Pomaro, N., et al. (2000). Plasma characterisation of a DC closed field magnetron sputtering device. In Europhysics conference abstracts of the 27th EPS Conference on Controlled Fusion and Plasma Physics (pp.17-20).

Plasma characterisation of a DC closed field magnetron sputtering device

Martines E;
2000
paper
magnetron sputtering
English
27th EPS Conference on Controlled Fusion and Plasma Physics - 12-16 June 2000
2000
Szegö, K; Todd, TN; Zoletnik, S
Europhysics conference abstracts of the 27th EPS Conference on Controlled Fusion and Plasma Physics
2000
24B
17
20
OR.005
http://ocs.ciemat.es/EPS2000/start.htm
open
Serianni, G., Antoni, V., Cavazzana, R., Mayni, L., Martines, E., Pomaro, N., et al. (2000). Plasma characterisation of a DC closed field magnetron sputtering device. In Europhysics conference abstracts of the 27th EPS Conference on Controlled Fusion and Plasma Physics (pp.17-20).
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/380345
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