In this paper a double axis micro Fluxgate magnetic sensor is presented The device represents an evolution of a PCB dual axis sensor previously realized. In the PCS version the experimental results exhibit excellent agreement with the simulations performed using a tool based on the finite element method. Using the same design approach a version of the double axis Fluxgate structure to be realized in IC technology is here proposed. The accurate study of the magnetic field distribution allows a 75% area saving for the IC version with respect to a direct scaling of the PCB version. Imposing an external magnetic field of about 60 μT, the simulated differential output voltage of the micro-integrated Fluxgate sensor achieves a peak value of 1 mV with 5 mA sinusoidal excitation current peak at 100 kHz. © 2005 IEEE.
Baschirotto, A., Dallago, E., Malcovati, P., Marchesi, M., Venchi, G. (2005). From a PCB Fluxgate to an integrated micro Fluxgate magnetic sensor. In Instrumentation and Measurement Technology Conference, 2005. IMTC 2005. Proceedings of the IEEE (pp.1756-1760) [10.1109/IMTC.2005.1604472].
From a PCB Fluxgate to an integrated micro Fluxgate magnetic sensor
BASCHIROTTO, ANDREA;
2005
Abstract
In this paper a double axis micro Fluxgate magnetic sensor is presented The device represents an evolution of a PCB dual axis sensor previously realized. In the PCS version the experimental results exhibit excellent agreement with the simulations performed using a tool based on the finite element method. Using the same design approach a version of the double axis Fluxgate structure to be realized in IC technology is here proposed. The accurate study of the magnetic field distribution allows a 75% area saving for the IC version with respect to a direct scaling of the PCB version. Imposing an external magnetic field of about 60 μT, the simulated differential output voltage of the micro-integrated Fluxgate sensor achieves a peak value of 1 mV with 5 mA sinusoidal excitation current peak at 100 kHz. © 2005 IEEE.
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