In this paper a double axis planar micro-Fluxgate magnetic sensor is presented. The ferromagnetic core material, the Vitrovac 6025 X, has been deposited on top of the coils with the DC-magnetron sputtering technique, a new type of procedure with respect the existing solutions in the field of Fluxgate sensor. This procedure allows us to obtain a core with the good magnetic properties of the amorphous ferromagnetic material, typical of a core 25 p.m thick, but with a thickness of only 1 μm, typical of a core electrodeposited. The micro-Fluxgate has been realized in a 0.5 μm CMOS process using copper metal lines to realize the excitation coil and aluminum metal lines for the sensing coils. Applying a triangular excitation current of 18 mA peak at 100 kHz the magnetic sensitivity achieved is about 0.45 mV/μT, suitable for detecting the Earth's magnetic field (±50 μT), while the linearity error is 1.15% of the full scale. The maximum angle error of the sensor, evaluating the Earth magnetic field, is 3.4°. The power consumption of the sensor is about 13.7 mW.
Baschirotto, A., Dallago, E., Malcovati, P., Marchesi, M., Melissano, E., Siciliano, P., et al. (2006). An integrated micro-fluxgate magnetic sensor with sputtered ferromagnetic core. In Conference Record - IEEE Instrumentation and Measurement Technology Conference (pp.2045-2049). Institute of Electrical and Electronics Engineers Inc. [10.1109/IMTC.2006.328426].
An integrated micro-fluxgate magnetic sensor with sputtered ferromagnetic core
BASCHIROTTO, ANDREA;
2006
Abstract
In this paper a double axis planar micro-Fluxgate magnetic sensor is presented. The ferromagnetic core material, the Vitrovac 6025 X, has been deposited on top of the coils with the DC-magnetron sputtering technique, a new type of procedure with respect the existing solutions in the field of Fluxgate sensor. This procedure allows us to obtain a core with the good magnetic properties of the amorphous ferromagnetic material, typical of a core 25 p.m thick, but with a thickness of only 1 μm, typical of a core electrodeposited. The micro-Fluxgate has been realized in a 0.5 μm CMOS process using copper metal lines to realize the excitation coil and aluminum metal lines for the sensing coils. Applying a triangular excitation current of 18 mA peak at 100 kHz the magnetic sensitivity achieved is about 0.45 mV/μT, suitable for detecting the Earth's magnetic field (±50 μT), while the linearity error is 1.15% of the full scale. The maximum angle error of the sensor, evaluating the Earth magnetic field, is 3.4°. The power consumption of the sensor is about 13.7 mW.
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