A 2.5-rad/s2 resolution micro-electro-mechanical system-based rotational accelerometer targeted for hard disk drive (HDD) application is presented. The device is composed by a 0.6-μm BICMOS electronic interface that implements together with the MEMS sensor one single bit electromechanical ΣΔ conversion loop able to detect capacitive unbalancing as low as 50 aF (50 · 10-18 F). The produced bitstream is then processed by a digital chain and made available through a standard three-wire digital interface. The device is intended for feedforward compensation of external disturbances acting on computer HDDs to steadily keep the read-write heads on track and to allow greater track densities
Gola, A., Pasolini, F., Chiesa, E., Lasalandra, E., Tronconi, M., Ungaretti, T., et al. (2003). A 2.5-rad/s^2 resolution digital output MEMS-based rotational accelerometer for HDD applications. IEEE TRANSACTIONS ON MAGNETICS, 39(2), 915-919 [10.1109/TMAG.2003.808947].
A 2.5-rad/s^2 resolution digital output MEMS-based rotational accelerometer for HDD applications
BASCHIROTTO, ANDREA;
2003
Abstract
A 2.5-rad/s2 resolution micro-electro-mechanical system-based rotational accelerometer targeted for hard disk drive (HDD) application is presented. The device is composed by a 0.6-μm BICMOS electronic interface that implements together with the MEMS sensor one single bit electromechanical ΣΔ conversion loop able to detect capacitive unbalancing as low as 50 aF (50 · 10-18 F). The produced bitstream is then processed by a digital chain and made available through a standard three-wire digital interface. The device is intended for feedforward compensation of external disturbances acting on computer HDDs to steadily keep the read-write heads on track and to allow greater track densities
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