A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. The system consists of a micro-integrated fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is realized with the VITROVAC 6025X deposited over the micro-integrated coils with the dc-magnetron sputtering deposition process. The sensor realized shows a linearity error of about 1.15% of the full scale in the range of +/- 50 mu T with a sensitivity of 0.45 mV/mu T. (c) 2006 Elsevier B.V. All rights reserved.
Baschirotto, A., Borghetti, F., Dallago, E., Malcovati, P., Marchesi, P., Melissano, E., et al. (2006). Fluxgate magnetic sensor and front-end circuitry in an integrated microsystem. SENSORS AND ACTUATORS. A, PHYSICAL, 132, 90-97 [10.1016/j.sna.2006.04.043].
Fluxgate magnetic sensor and front-end circuitry in an integrated microsystem
BASCHIROTTO, ANDREA;
2006
Abstract
A complete vector-2D integrated microsensor system for magnetic field measurement is proposed. The system consists of a micro-integrated fluxgate magnetometer with front-end electronic circuitry based on second-harmonic detection. The magnetic core of the sensor is realized with the VITROVAC 6025X deposited over the micro-integrated coils with the dc-magnetron sputtering deposition process. The sensor realized shows a linearity error of about 1.15% of the full scale in the range of +/- 50 mu T with a sensitivity of 0.45 mV/mu T. (c) 2006 Elsevier B.V. All rights reserved.I documenti in IRIS sono protetti da copyright e tutti i diritti sono riservati, salvo diversa indicazione.