A low-power interface for readout and motion-control of a MEMS capacitive sensor is presented. The interface consists of a hybrid third-order sigma-delta modulator. The interface enhances the linearity and stability of the sensor by applying force feedback through bias voltage modulation. The modulator employs a hybrid, continuous + discrete -time topolooy, to reduce power consumption by avoiding a separate pre-amplifier for the sensor. Power consumption in the modulator is further reduced by an opamp sharing scheme. The interface is designed in 0.35um CMOS technology and is simulated in Cadence-Spectre. Simulation results are shown for a MEMS capacitive Microphone(1)
Jawed, S., Cattin, D., Gottardi, M., Massari, N., Oboe, R., Baschirotto, A. (2008). A low-power interface for the readout and motion-control of a MEMS capacitive sensor. In AMC '08: 10TH INTERNATIONAL WORKSHOP ON ADVANCED MOTION CONTROL, VOLS 1 AND 2, PROCEEDINGS (pp.122-125). IEEE [10.1109/AMC.2008.4516052].
A low-power interface for the readout and motion-control of a MEMS capacitive sensor
BASCHIROTTO, ANDREA
2008
Abstract
A low-power interface for readout and motion-control of a MEMS capacitive sensor is presented. The interface consists of a hybrid third-order sigma-delta modulator. The interface enhances the linearity and stability of the sensor by applying force feedback through bias voltage modulation. The modulator employs a hybrid, continuous + discrete -time topolooy, to reduce power consumption by avoiding a separate pre-amplifier for the sensor. Power consumption in the modulator is further reduced by an opamp sharing scheme. The interface is designed in 0.35um CMOS technology and is simulated in Cadence-Spectre. Simulation results are shown for a MEMS capacitive Microphone(1)
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