This paper presents a complete gas-sensing chip. It consists of a high-efficiency temperature control loop with aswitching power stage and digital set-point and of a wide-dynamic-range interface circuit able to operate without calibration. Measurements results show that the controlled temperature of the sensor over a range of 250 °C exhibits an accuracy better than 1.5 °C with a maximum peak-to-peak ripple of 1.0 °C. The read-out circuit achieves, without calibration, a precision in sensor resistance measurement of 2.65% over a range of 5.3 decades (Dynamic Range, DR=138 dB). The overall system is flexible and can be interfaced to sensors with different fabrication parameters.The prototype chip, designed in a 0.35-μ.m CMOS technology, includes on the same 10-mm2 die the precision read-out circuit and the switching power stage. In spite of the interferences produced by the power stage, the read-out circuit maintains always a DR performance above 130 dB.© 2008 IEEE.

Lombardi, A., Grassi, M., Bruno, L., Malcovati, P., Baschirotto, A. (2008). A fully integrated interface circuit for 1.5°C accuracy temperature control and 130-dB dynamic-range read-out of MOX gas sensors. In Solid-State Circuits Conference, 2008. ESSCIRC 2008. 34th European (pp.78-81). 345 E 47TH ST, NEW YORK, NY 10017 USA : IEEE [10.1109/ESSCIRC.2008.4681796].

A fully integrated interface circuit for 1.5°C accuracy temperature control and 130-dB dynamic-range read-out of MOX gas sensors

BASCHIROTTO, ANDREA
2008

Abstract

This paper presents a complete gas-sensing chip. It consists of a high-efficiency temperature control loop with aswitching power stage and digital set-point and of a wide-dynamic-range interface circuit able to operate without calibration. Measurements results show that the controlled temperature of the sensor over a range of 250 °C exhibits an accuracy better than 1.5 °C with a maximum peak-to-peak ripple of 1.0 °C. The read-out circuit achieves, without calibration, a precision in sensor resistance measurement of 2.65% over a range of 5.3 decades (Dynamic Range, DR=138 dB). The overall system is flexible and can be interfaced to sensors with different fabrication parameters.The prototype chip, designed in a 0.35-μ.m CMOS technology, includes on the same 10-mm2 die the precision read-out circuit and the switching power stage. In spite of the interferences produced by the power stage, the read-out circuit maintains always a DR performance above 130 dB.© 2008 IEEE.
paper
CMOS technology; MOX gas sensor; Pt-Ti; Si; dynamic-range read-out circuit; fully integrated interface circuit; integrated platinum-titanium heater; metal-oxide thin films; prototype chip design; resistance measurement; silicon micromachined substrates; size 0.35 mum; sol-gel technique; spin coating deposition; temperature 1.5 C; temperature 250 C; temperature control; CMOS integrated circuits; electric resistance measurement; gas sensors; microsensors; platinum compounds; readout electronics; silicon; sol-gel processing; spin coating; temperature control; temperature sensors; thin film sensors
English
34th European Solid-State Circuits Conference, ESSCIRC 2008
2008
Solid-State Circuits Conference, 2008. ESSCIRC 2008. 34th European
9781424423620
2008
78
81
4681796
none
Lombardi, A., Grassi, M., Bruno, L., Malcovati, P., Baschirotto, A. (2008). A fully integrated interface circuit for 1.5°C accuracy temperature control and 130-dB dynamic-range read-out of MOX gas sensors. In Solid-State Circuits Conference, 2008. ESSCIRC 2008. 34th European (pp.78-81). 345 E 47TH ST, NEW YORK, NY 10017 USA : IEEE [10.1109/ESSCIRC.2008.4681796].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/36613
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