This paper presents a low-power CMOS interface for a MEMS capacitive sensor. The interface has embedded force-balancing capability which improves the linearity of the readout for higher sound pressures. The interface also features a bias-charge control functionality to enhance the sensitivity of the microphone. The interface employs boot-strapped preamplifier for active parasitic capacitance compensation, followed by a 3rd-order sigma-delta modulator. The interface is designed in 0.35um CMOS technology and its brief simulation results in Cadence-Spectre are presented. © 2008 IEEE.
Jawed, S., Cattin, D., Massari, N., Gottardi, M., Baschirotto, A. (2008). A MEMS microphone interface with force-balancing and charge-control. In Research in Microelectronics and Electronics, 2008. PRIME 2008. Ph.D. (pp.97-100). 345 E 47TH ST, NEW YORK, NY 10017 USA : IEEE [10.1109/RME.2008.4595734].
A MEMS microphone interface with force-balancing and charge-control
BASCHIROTTO, ANDREA
2008
Abstract
This paper presents a low-power CMOS interface for a MEMS capacitive sensor. The interface has embedded force-balancing capability which improves the linearity of the readout for higher sound pressures. The interface also features a bias-charge control functionality to enhance the sensitivity of the microphone. The interface employs boot-strapped preamplifier for active parasitic capacitance compensation, followed by a 3rd-order sigma-delta modulator. The interface is designed in 0.35um CMOS technology and its brief simulation results in Cadence-Spectre are presented. © 2008 IEEE.
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