The presence of azimuthally propagating waves in the planar magnetron plasma operated in direct current (dc) was investigated. The destabilization of these waves was observed due to the combined effect of pressure gradient and applied electric field. Azimuthal mode numbers were observed on the spectrum in standard conditions, with relative neutral gas pressure dependent amplitudes. The results show that the wave frequency decreases with increasing pressure.
Martines, E., Zuin, M., Antoni, V., Cavazzana, R., Serianni, G., Spolaore, M., et al. (2004). Experimental investigation of low-frequency waves propagating in a direct current planar magnetron plasma. PHYSICS OF PLASMAS, 11(5), 1938-1946 [10.1063/1.1695557].
Experimental investigation of low-frequency waves propagating in a direct current planar magnetron plasma
Martines E
Primo
;
2004
Abstract
The presence of azimuthally propagating waves in the planar magnetron plasma operated in direct current (dc) was investigated. The destabilization of these waves was observed due to the combined effect of pressure gradient and applied electric field. Azimuthal mode numbers were observed on the spectrum in standard conditions, with relative neutral gas pressure dependent amplitudes. The results show that the wave frequency decreases with increasing pressure.
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