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Carra, C., Barni, R., Di Martino, D., Natalello, A., Riccardi, C. (2019). Deposition and characterization of SiOx-like thin films from HMDSO mixtures plasmas. In 46th EPS Conference on Plasma Physics, EPS 2019. European Physical Society (EPS).

Deposition and characterization of SiOx-like thin films from HMDSO mixtures plasmas

Carra C.;Barni R.;Di Martino D.;Natalello A.;Riccardi C.
Ultimo
2019
poster + paper
plasma deposition, thin film
English
46th European Physical Society Conference on Plasma Physics, EPS 2019
2019
Riconda, C; Brezinsek, S; McCarty, K; Lancaster, K; Burgess, D; Brault, P
46th EPS Conference on Plasma Physics, EPS 2019
979-10-96389-11-7
2019
43C
P4.3021
http://ocs.ciemat.es/EPS2019PAP/pdf/P4.3021.pdf
none
Carra, C., Barni, R., Di Martino, D., Natalello, A., Riccardi, C. (2019). Deposition and characterization of SiOx-like thin films from HMDSO mixtures plasmas. In 46th EPS Conference on Plasma Physics, EPS 2019. European Physical Society (EPS).
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/322587
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