A fully-integrated biaxial linear accelerometer realized in a standard 0.5μm CMOS technology is proposed. The device features a full-scale of ±1g and a sensitivity of 250μg. No external components are required since a switched-capacitor low-pass filter is internally embedded which limits the output signal band to 30Hz. The biaxial sensor is packaged with the electronics. In the final device only four pins are active, plus a test pin. The device sensitivity is on-chip factory trimmed. This sensitivity is adjusted with a total accuracy of ±10%. The device exhibits a SNR of about 80dB and consumes 45mW from a single 5V supply
Gola, A., Bendiscioli, P., Chiesa, E., Lasalandra, E., Pasolini, F., Tronconi, M., et al. (2002). A 80dB-SNR ±1g fully-integrated biaxial linear accelerometer in a standard 0.5µm CMOS technology for high-sensitivity applications. In Solid-State Circuits Conference, 2002. ESSCIRC 2002 Proceedings of the 28th European (pp.631-634).
A 80dB-SNR ±1g fully-integrated biaxial linear accelerometer in a standard 0.5µm CMOS technology for high-sensitivity applications
BASCHIROTTO, ANDREA
2002
Abstract
A fully-integrated biaxial linear accelerometer realized in a standard 0.5μm CMOS technology is proposed. The device features a full-scale of ±1g and a sensitivity of 250μg. No external components are required since a switched-capacitor low-pass filter is internally embedded which limits the output signal band to 30Hz. The biaxial sensor is packaged with the electronics. In the final device only four pins are active, plus a test pin. The device sensitivity is on-chip factory trimmed. This sensitivity is adjusted with a total accuracy of ±10%. The device exhibits a SNR of about 80dB and consumes 45mW from a single 5V supply
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