SiHx (x = 1,2,3) ions impact on Si(001)(1 x 1):H and Si(001)(2 x 1):H surfaces has been studied by classical molecular dynamic simulations, considering an energetic range for the impinging species from 5 to 15 eV. Despite the initial full H coverage a high sticking coefficient has been obtained for all the species under investigation. A considerable fraction of adsorption events causes H removal from the surface while for other simulations a soft landing mechanism of the ions has been observed. Few representative minima for SiH2/ Si(0 01)(2 x 1):H were re-converged by ab initio calculations in order to check the reliability of our results. (C) 2007 Elsevier B.V. All rights reserved.

Cereda, S., Montalenti, F., & Miglio, L. (2007). Interaction od SiHx precursors with hydrogen-covered Si surfaces: impact dynamics and adsorption sites. SURFACE SCIENCE, 601(18), 3970-3973 [10.1016/j.susc.2007.04.086].

Interaction od SiHx precursors with hydrogen-covered Si surfaces: impact dynamics and adsorption sites

MONTALENTI, FRANCESCO CIMBRO MATTIA;MIGLIO, LEONIDA
2007-09

Abstract

SiHx (x = 1,2,3) ions impact on Si(001)(1 x 1):H and Si(001)(2 x 1):H surfaces has been studied by classical molecular dynamic simulations, considering an energetic range for the impinging species from 5 to 15 eV. Despite the initial full H coverage a high sticking coefficient has been obtained for all the species under investigation. A considerable fraction of adsorption events causes H removal from the surface while for other simulations a soft landing mechanism of the ions has been observed. Few representative minima for SiH2/ Si(0 01)(2 x 1):H were re-converged by ab initio calculations in order to check the reliability of our results. (C) 2007 Elsevier B.V. All rights reserved.
Articolo in rivista - Articolo scientifico
PECVD, modeling, molecular dynamics, atom-surface interaction; empirical calculations; hydrogen; silicon; density functional
English
3970
3973
4
Cereda, S., Montalenti, F., & Miglio, L. (2007). Interaction od SiHx precursors with hydrogen-covered Si surfaces: impact dynamics and adsorption sites. SURFACE SCIENCE, 601(18), 3970-3973 [10.1016/j.susc.2007.04.086].
Cereda, S; Montalenti, F; Miglio, L
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Utilizza questo identificativo per citare o creare un link a questo documento: http://hdl.handle.net/10281/2353
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