Laser-induced breakdown spectroscopy for compositional analysis of multielemental thin films

The laser-induced breakdown spectroscopy technique is employed for compositional analyses of thin films produced by pulsed laser ablation of multielemental targets. Information about the atomic concentration of the chemical species from the irradiated target is inferred by means of the optical emission spectra of the plasma generated during laser ablation. The atomic concentration percentages and the atomic concentration ratios of the elements of Co-based magnetic alloy targets are deduced from the integrated intensities of selected emission lines of the alloy components. The experimental results show that Co atomic percentage concentration and CSi/CCoand CCr/CCoatomic concentration ratios are in agreement with the corresponding values obtained by traditional compositional analysis techniques. On the contrary, Si atomic percentage concentration values are in disagreement, since the used emission lines have significant self-absorption values. Therefore, the work proves that laser-induced breakdown spectroscopy is adequate for elemental concentration measurements provided an accurate choice of the emission lines. © 2006 Elsevier B.V. All rights reserved