Results of measurements of x-ray diffraction, electron scanning microscopy and electrical conductivity of thick, polycrystalline RuO2 films obtained by decomposing ruthenium trichloride are presented and discussed. The influence of the preparation procedure, process temperature, chlorine content and nature of the substrate on electrical and structural properties is also considered.

Pizzini, S., Buzzanca, G., Mari, C., Rossi, L., Torchio, S. (1972). Preparation, structure and electrical properties of thick ruthenium dioxide films. MATERIALS RESEARCH BULLETIN, 7(5), 449-462 [10.1016/0025-5408(72)90147-X].

Preparation, structure and electrical properties of thick ruthenium dioxide films

Pizzini, S;MARI, CLAUDIO MARIA;
1972

Abstract

Results of measurements of x-ray diffraction, electron scanning microscopy and electrical conductivity of thick, polycrystalline RuO2 films obtained by decomposing ruthenium trichloride are presented and discussed. The influence of the preparation procedure, process temperature, chlorine content and nature of the substrate on electrical and structural properties is also considered.
Articolo in rivista - Articolo scientifico
Structure, Electrical properties
English
1972
7
5
449
462
none
Pizzini, S., Buzzanca, G., Mari, C., Rossi, L., Torchio, S. (1972). Preparation, structure and electrical properties of thick ruthenium dioxide films. MATERIALS RESEARCH BULLETIN, 7(5), 449-462 [10.1016/0025-5408(72)90147-X].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/45108
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