A low-power front-end for a capacitive MEMS accelerometer sensor is presented. The read-out front-end includes the analog preamplifier (to sense the signal coming from the MEMS) and a Successive-Approximation A/D Converter. The off-chip MEMS is a capacitive accelerometer. Constant-charge Capacitance-to-Voltage conversion has been used with a programmable-gain (to accommodate different MEMS sensor sensitivity) Continuous-Time Preamplifier to reduce power consumption and circuit complexity. A very high- impedance MOS transistor is used for MEMS biasing, thus providing a very low frequency (<1Hz) AC-coupling. A prototype of the entire front-end channel has been implemented in a 0.13μm CMOS technology. The overall power consumption is 90μW from a single 1.2 V supply voltage. A 51dB-SNR over [1Hz-4kHz] bandwidth is achieved.
DE MATTEIS, M., Pezzotta, A., Sabatini, M., Grassi, M., Croce, M., Malcovati, P., et al. (2015). A 0.13μm-CMOS 90μW 51dB-SNR continuous-time accelerometer front-end with 10b SAR-ADC. In SENSORS, 2015 IEEE (pp.1393-1396). Institute of Electrical and Electronics Engineers Inc. [10.1109/ICSENS.2015.7370534].
A 0.13μm-CMOS 90μW 51dB-SNR continuous-time accelerometer front-end with 10b SAR-ADC
DE MATTEIS, MARCELLOPrimo
;PEZZOTTA, ALESSANDROSecondo
;BASCHIROTTO, ANDREAUltimo
2015
Abstract
A low-power front-end for a capacitive MEMS accelerometer sensor is presented. The read-out front-end includes the analog preamplifier (to sense the signal coming from the MEMS) and a Successive-Approximation A/D Converter. The off-chip MEMS is a capacitive accelerometer. Constant-charge Capacitance-to-Voltage conversion has been used with a programmable-gain (to accommodate different MEMS sensor sensitivity) Continuous-Time Preamplifier to reduce power consumption and circuit complexity. A very high- impedance MOS transistor is used for MEMS biasing, thus providing a very low frequency (<1Hz) AC-coupling. A prototype of the entire front-end channel has been implemented in a 0.13μm CMOS technology. The overall power consumption is 90μW from a single 1.2 V supply voltage. A 51dB-SNR over [1Hz-4kHz] bandwidth is achieved.
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