We report the structural and tribological characterization of nanostructured CNx thin films produced by the deposition of a supersonic carbon cluster beam assisted by nitrogen ion bombardment. The influence of the deposition parameters on the chemical composition and structure of the films has been systematically studied by X-ray photoelectron spectroscopy, elastic recoil detection analysis, transmission electron microscopy and atomic force microscopy. Depending on the deposition parameters, the films show a structure ranging from amorphous to disordered graphitic with interlinked planes. Nitrogen content depends on the nitrogen ion kinetic energy. The films have a very low density with a high surface roughness. Friction measurements at the nanoscale show a correlation between nitrogen content and mechanical properties of the system.

Blomqvist, B., Bongiorno, G., Podestà, A., Serin, V., Abrasonis, G., Kreissig, U., et al. (2007). Structural and tribological properties of cluster-assembled CNx films. APPLIED PHYSICS. A, MATERIALS SCIENCE & PROCESSING, 87(4), 767-772 [10.1007/s00339-007-3898-8].

Structural and tribological properties of cluster-assembled CNx films

CASSINA, VALERIA;
2007

Abstract

We report the structural and tribological characterization of nanostructured CNx thin films produced by the deposition of a supersonic carbon cluster beam assisted by nitrogen ion bombardment. The influence of the deposition parameters on the chemical composition and structure of the films has been systematically studied by X-ray photoelectron spectroscopy, elastic recoil detection analysis, transmission electron microscopy and atomic force microscopy. Depending on the deposition parameters, the films show a structure ranging from amorphous to disordered graphitic with interlinked planes. Nitrogen content depends on the nitrogen ion kinetic energy. The films have a very low density with a high surface roughness. Friction measurements at the nanoscale show a correlation between nitrogen content and mechanical properties of the system.
Articolo in rivista - Articolo scientifico
nanostructured CNx, tribological characterization
English
2007
87
4
767
772
none
Blomqvist, B., Bongiorno, G., Podestà, A., Serin, V., Abrasonis, G., Kreissig, U., et al. (2007). Structural and tribological properties of cluster-assembled CNx films. APPLIED PHYSICS. A, MATERIALS SCIENCE & PROCESSING, 87(4), 767-772 [10.1007/s00339-007-3898-8].
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Utilizza questo identificativo per citare o creare un link a questo documento: https://hdl.handle.net/10281/1179
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